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Hi ,
It is important to understand if the damage is on the metadata of the LUN or the actual data(where VM resides). Metadata spans about less than first 1.5 GB of the vmfs volume.
You would not be able to selectively replace a file into a LBA region(even if you manage to trace it I not sure if this is possible at all), the volume will be corrupted nonetheless.
If its metadata or actual data, avoid powering off VM's
Safe Options are
1-Use converter to migrate V2V the VM's -- I say this since in the past, Storage VMotion of VM from a corrupted datastore can lead to VM crash and subsequently may fail to power on.
2-Re-create VMFS volumes on affected lun
I know this is the hard way. But certainly would not recommend replacing individual files from tape, knowing that there is some damage to the filesystem.
Hope this helps and all the best.