Для начала посмотрите не запушена ли ваша ВМ (esxtop, потом V). Если она запущена, то попробуйте её остановить:
# esxcli vms vm list
TEMP-UPP
World ID: 463163
Process ID: 0
VMX Cartel ID: 463162
UUID: 56 4d c7 12 bf 8e 81 ff-82 a9 2e a8 71 8f 1b 21
Display Name: TEMP-UPP
Config File: /vmfs/volumes/4d90e4ac-4333e736-8f9c-001d096a0efe/TEMP-UPP/TEMP-UPP.vmx
# esxcli vms vm kill --help
Usage: esxcli vms vm kill <options>
Description: Used to forcibly kill Virtual Machines that are stuck and not responding to normal stop operations.
-h|--help Show the help message.
-t|--type The type of kill operation to attempt. There are three types of VM kills that can be attempted: [soft, hard, force]. Users should
always attempt 'soft' kills first, which will give the VMX process a chance to shutdown cleanly (like kill or kill -SIGTERM). If that
does not work move to 'hard' kills which will shutdown the process immediately (like kill -9 or kill -SIGKILL). 'force' should be used as
a last resort attempt to kill the VM. If all three fail then a reboot is required.
-w|--world-id The World ID of the Virtual Machine to kill. This can be obtained from the 'vm list' command
После этого попробуйте удалить те самые файлы.
------------- http://communities.vmware.com/blogs/Deshifrator
