I am back 4 years later with the same problem I had with version 4. The VIA CPU Epia M / CLE266 chipset is not supported by the latest version of VMWare...
Version 5 would run but I haven't used it in a couple of years and system upgrades means I no longer have it installed.
vcpu-0:VMM fault: regs=0x5d0c, exc=6, eip=0x9a310
Cheers
Tony